A Novel High Frequency Surface Acoustic Wave Device Based on Piezoelectric Interdigital Transducers

Abstract

We report on the fabrication of a novel surface acoustic wave device based on piezoelectric interdigital transducers designed in high quality films of Pb(Zr_0.2Ti_0.8)O₃ grown by RF magnetron sputtering. The approach followed is to replace the conventional metallic interdigital transducers by piezoelectric ones consisting of a series of ferroelectric domains with alternating polarization states. The artificial modification of the ferroelectric domain structure is realized by using an atomic force microscope as a local electric field source. A 1.2 μ m wavelength device has been realized and its transmission properties simulated.

Keywords:

• SAW
• PZT
• oxide thin films
• piezoelectricity

ACKNOWLEDGMENTS

This work was supported by the Swiss National Science Foundation through the National Centre of Competence in Research “Materials with Novel Electronic Properties-MaNEP” and Division II, NEDO and ESF (Thiox).