Predicted Frequency Response of Integrated Pyroelectric PNZT Infrared Detectors

Abstract

Numerous studies have been carried out on the fabrication of ferroelectric lead titanate (PT) and lead zirconate titanate (PZT) thin films and their applications to pyroelectric sensors [1–3]. Not many efforts have been made to integrate the films with silicon technology. In this article, we report on the growth of lead-zirconium-titanates films doped with niobium (PNZT) by a sol-gel method on platinized Si substrates along with its characteristics for use in infrared sensor applications.

Keywords:

• Pyroelectric IR detector
• PNZT film
• thermal modeling

ACKNOWLEDGEMENTS

The partial financial support for this work through NSF Capacity Building grant # 0236425 and US Army SMDC grant # DASG60-03-01-0003 is gratefully acknowledged. The PNZT thin film work at the University of Alabama, Tuscaloosa, is supported by the Federal Aviation Administration (FAA).