Imprint Characteristics of (Bi,La)₄Ti₃O₁₂-Layered Perovskite Ferroelectric Thin Films

Abstract

We have investigated the imprint characteristics of 100 nm thick-(Bi,La)₄Ti₃O₁₂, BLT, films prepared both using metal-organic decomposition (MOD) and Sol-Gel spin coating process after the storage for 2 hours to 96 hours at high temperatures of 85°C, 125°C, 150°C, and 175°C, respectively. Reading and writing operation were performed at 25°C and 90°C, respectively. From the results, It was revealed that the imprint characteristics of MOD-BLT and Sol-Gel BLT are almost similar properties.

Keywords:

• BLT
• imprint
• ferroelectic thin films
• FeRAM