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Abstract
Ferroelectric PZT thin films were deposited by liquid delivery MOCVD using a novel cocktail solution. The cocktail solution consisted of Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4 diluted with ECH. This cocktail solution was stable at least 6 months and perfectly vaporized above 270°C. The precursors of the constituent of this cocktail solution had close thermal decomposition temperatures. Although the deposited films were crystallized into perovskite PZT phase at the substrate temperatures ranging from 475°C to 600°C, the only films deposited at the substrate temperature of 550°C were crystallized into perovskite PZT single phase. The PZT thin films deposited at the substrate temperature of 550°C showed good hysteresis properties with the 2P r of 72 μ C/cm2 and the 2E c of 144 kV/cm.
ACKNOWLEDGMENT
The authors would like to thank Dr. Akimasa Yajima and Mr. Naoki Yamada (Asahi Denka Kogyo K. K.) for preparation of the cocktail solutions, measuring of the source materials and their useful advice, and Mr. Masaaki Kurita (Tanaka Kikinzoku Kogyo K. K.) for preparation of the Pt-sputtered substrates.