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ABSTRACT
In this study, we report on the (100) cube-textured Pb(Zr0.4,Ti0.6)O3 (PZT) thin films using a conducting perovskite CaRuO3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (Pr) and coercive field (Ec) of 25 μ C/cm2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.
ACKNOWLEDGMENTS
This work supported by the Ministry of Education (project named “Brain Korea 21”). And the authors gratefully acknowledge the experimental support by Dr. Seung-Hyun Kim, in Inostek Inc., Korea, and Heesan Kim, Ph.D. candidate the Department of Material Science & Engineering, KAIST, Korea.