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ABSTRACT
Lead zirconate titanate (PZT, 53/47) films were successfully fabricated on multi-layers substrate (Pt/Ti/SiO2/Si) by the spin-coating via sol-gel process. A special core-shell structure was formed in the films by the adding of PVA polymer. XRD results showed that PZT films transform to pure perovskite phase entirely after annealing at 700°C for 90 min. By EPMA analysis, the composition of PZT thin film derived by this procedure was located at the morphotrophic phase boundary (MPB) region. Furthermore, the composition variations in the core-shell structure were identified by the backscattering electron image (BEI) analysis. With this innovative procedure, crack-free PZT films were successfully obtained.
ACKNOWLEDGMENT
The authors would like to thank the National Science Council of Taiwan, Republic of China, for its financial support under Contract No. NSC 91-2216-E006-042.
Notes
*All is analyzed by EPMA-WDS.
**V3 and V4 are denoted as the weight percentages [PVA/ (PZT + PVA) *100%] of 25 wt% and 20 wt%, respectively.