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ABSTRACT
The effects of rapid thermal annealing (RTA) on microstructures, properties, and residual stress of Pt/Ti electrodes and sol-gel derived lead zirconate titanate (PZT) films were investigated. It was found that when heating rate was 3.5°C/s, the Pt/Ti electrode conglomerated to form a typical hillock surface morphology, companied by remarkable degradations in both surface roughness and electric conductivity. When using 10.5°C/s as the heating rate, the Pt/Ti conglomeration and degradation can be effectively retarded. Accordingly, the PZT film exhibited different properties at various RTA conditions. Furthermore, Ti diffusion was found mainly happened in a short period after heat-treatment started.