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ABSTRACT
Ba0.6Sr0.4TiO3 (BST) thin films were deposited on Pt/Ti/LaAlO3 (100) substrates by radio-frequency magnetron sputtering. Not only the fatigue characteristic of BST thin film but also the temperature and frequency dependences of dielectric constant (ε r ), loss tangent (tanδ) and tunability (at 300 kV/cm) were investigated. With the temperature increasing, the dielectric constant of BST thin film increases slowly and the fluctuation range is about 10%. From 20 Hz to 1 MHz, dielectric constant, loss tangent and tunability of BST thin films have a little change. After a hundred million reversals, the tunability of BST thin film slightly decreased, and the dielectric loss increased synchronously. The results reveal that BST thin films have high reliability including temperature, frequency stability and anti-fatigue characteristic.
ACKNOWLEDGMENT
This research is supported by the National Natural Science Foundation of China (No. 60607004) and the State Key Program for Basic Research of China (No. 61363).