CORRELATION OF GRAIN AND DOMAIN STRUCTURES IN PZT THIN FILMS

O. M. ZHIGALINA A.V. Shubnikov Institute of Crystallography RAS, Leninskii prospekt, 59, 119333, Moscow, Russia

R. V. GAYNUTDINOV A.V. Shubnikov Institute of Crystallography RAS, Leninskii prospekt, 59, 119333, Moscow, Russia

D. N. KHMELENIN A.V. Shubnikov Institute of Crystallography RAS, Leninskii prospekt, 59, 119333, Moscow, Russia

K. A. VOROTILOV Moscow State Institute of Radioengineering, Electronics and Automation, (Technical University), prospekt Vernadskogo, 78, 119454, Moscow, Russia

A. S. SIGOV Moscow State Institute of Radioengineering, Electronics and Automation, (Technical University), prospekt Vernadskogo, 78, 119454, Moscow, Russia

ABSTRACT

Pb(Ti_0.47,Zr_0.53)O₃ thin films have been investigated by atomic force microscopy, transmission electron microscopy and energy-dispersive X-ray analysis. The films were prepared by chemical solution deposition with 5–50 mol.% excess of PbO in initial solution on Si/SiO₂/Ti/Pt substrates and annealed at 650°C × 20 min. Phase composition, grain and domain structures have been discussed and compared with electrical properties.

Keywords:

ACKNOWLEDGMENTS

The work was supported by the State Program for Support of Leading Scientific schools, project Ne; NSh-1955.2008.2. We kindly acknowledge SMA and FEI Companies and personally Dr. E. Sourty for organization of the opportunity to study the films structure by EELS.

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CORRELATION OF GRAIN AND DOMAIN STRUCTURES IN PZT THIN FILMS

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CORRELATION OF GRAIN AND DOMAIN STRUCTURES IN PZT THIN FILMS

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