ELECTRIC PROPERTIES OF PIEZOELECTRIC FILM FABRICATED BY ELECTROPHORESIS DEPOSITION METHOD

ABSTRACT

This study presents dielectric and piezoelectric properties of piezoelectric thick film processed by electrophoresis deposition method. 1 μm∼200 μm-thick film were fabricated by electrophoresis depostion method. The dielectric constant and piezoelectric property of the piezoelectric film increased as the film become thicker. When an electric field < 3 kV/mm was applied, their dielectric and piezoelectric properties changed with their thickness. At an electric field > 3 kV/mm their properties are constant regardless of their thickness. These changes can be explained by the existence of many void defects to be inevitabley introduced in thick film fabrication process, which can be one of crucial causes of controlling ferrroelectric properties of thick films. The change in dielectric and piezoelectric properties was evaluated by introducing simplified composite concept.

Keywords:

• Piezoelectric thick film
• electrophoresis deposition
• thickness dependence of dielectric properties

ACKNOWLEDGMENT

This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea