EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O₃ FILM BY RAMAN SPECTROSCOPY

MASAMICHI NISHIDE Department of Communications Engineering, National Defense Academy, Yokosuka-shi, Kanagawa, 239-8686, Japan

HIROSHIGE TAKEUCHI Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada-cho, Kochi, 782-8502, Japan

TAKESHI TAI Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada-cho, Kochi, 782-8502, Japan

TAKASHI KATODA Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, Tosayamada-cho, Kochi, 782-8502, Japan

SHINTARO YOKOYAMA Tokyo Institute of Technology, Yokohama, 226-8502, Japan

SHINTARO YASUI Tokyo Institute of Technology, Yokohama, 226-8502, Japan

HIROSHI FUNAKUBO Tokyo Institute of Technology, Yokohama, 226-8502, Japan

KEN NISHIDA Department of Communications Engineering, National Defense Academy, Yokosuka-shi, Kanagawa, 239-8686, Japan

TAKASHI YAMAMOTO Department of Communications Engineering, National Defense Academy, Yokosuka-shi, Kanagawa, 239-8686, Japan

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ABSTRACT

Volume fractions of tetragonal phase (V _T) in the epitaxial Pb(Zr,Ti)O₃ (PZT) thick films were evaluated using micro-Raman spectroscopy. The crystal structure was the single phase of tetragonal and rhombohedral when Zr/(Zr+Ti) ratio was under 0.43 and over 0.6, respectively. There was the two phases coexistence between 0.43 and 0.6 of Zr/(Zr+Ti) ratio. It was found that the dominant crystal phase change from tetragonal to rhombohedral one with increasing the Zr/(Zr+Ti) ratio. However, crystal symmetry was not uniform; V _T was found to gradually change along film thickness direction from near the substrate to the film surface.

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ACKNOWLEDGMENTS

A part of this work was supported by “Foundation for Promotion of Material Science and technology go Japan (MST Foundation)”.

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EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O₃ FILM BY RAMAN SPECTROSCOPY

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EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O3 FILM BY RAMAN SPECTROSCOPY

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EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O₃ FILM BY RAMAN SPECTROSCOPY