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Abstract
Novel Barium Strontium Titanate (BST) thin film varactors with parallel capacitor architecture were designed fabricated and tested. Varactors with 2–6 parallel capacitors were experimentally verified using large area processed bst thin films. The multicapacitor varactor shunt switches provided improved isolation at the expense of higher insertion loss. The multicapacitor varactors yielded reduced overall parasitic series inductance and resistances, resulting in higher quality factor Q. This is the first time such a device is reported.
