The Model of Nano-Scale Particle Removal in CO₂-Based Micelle Cleaning Solutions

Abstract

This study focuses on the description of the static forces in CO₂-based micelle cleaning solutions with a separate fluid phase entrapped between nano-scale copper particles and a silicon wafer. Calculations demonstrate that high pressure could impose enough capillary pressure effect beneath a particle to compete with the net adhesion force and increase the particle surface separation distance. Although the value of NAF decrease with the decrease of immersion height, the ESD exhibits a maximum with respect to the immersion height as the surfactant concentration is given. For the system which has variety dimensions of particles, both of the NAF and ESD values decrease with the decrease of the particle radius.

Keywords:

• Equilibrium separation distance
• net adhesion force
• high pressure; supercritical CO₂

Acknowledgment

The work is supported by the National Nature Science Foundation of China (Grant No. 20576140, 20876169) and the program for new certry excellent talents in university (NCET-07-0769).