Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy

T. Tai Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

K. Wasa Dept. of Micro eng., Kyoto University

J. Kim Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

T. Kouzu Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

M. Matsuoka Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

M. Nishide Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

H. Shima Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

K. Nishida Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

Takashi Yamamoto Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan

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Abstract

Single-c-domain/single-crystal PZT thin films grown by rf magnetron sputtering on SrRuO₃/Pt/MgO substrates was investigated by Raman spectroscopy. The Raman spectroscopy measurement revealed that the sputter deposited thin film has high quality and highly c domain oriented. In addition, Raman spectroscopy revealed the local strain configuration in the sputtered thin films from the surface to the substrates. These local stresses were discussed with dielectric property.

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Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy

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Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy

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