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Integrated Ferroelectrics
An International Journal
Volume 145, 2013 - Issue 1
44
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Original Articles

Characterization of Cathodic-Arc-Ion-Plated ZrN/TiN Stacked Nano-Thin Film and Zr1-xTixN Films

Pages 151-157 | Received 23 Jul 2012, Accepted 01 Feb 2013, Published online: 12 Jul 2013
 

Abstract

The structure, hardness and corrosion resistance of ZrN, Zr0.3Ti0.7N, Zr0.7Ti0.3N, TiN films and ZrN/TiN stacked nano-thin films coated 304 stainless steel and ASP 23 high speed steel were studied. These films were deposited by the cathodic arc ion plating deposition (CAIPD) process at 450°C. The highest hardness and the best corrosion resistance are in the ZrN/TiN stacked nano-thin film coated steel, resulting from the periodic interface structure. The other coated steels also show the improved hardness and the corrosion behavior. The microhardness of the ZrN/TiN stacked nano-thin film coated high-speed steel reaches as high as 4257 HV0.010.

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