Abstract
In this paper, empirical data describing the channel resistance and polarization of several metal-ferroelectric-semiconductor field-effect transistors (MFSFETs) is presented. Various channel length and width transistors were used to describe the channel resistance under various biasing conditions and in both positive and negative polarization states. The presented results and analysis provide insight into the switching speed between polarization states as well as the timing and retention constraints for a given set of device dimensions. This is of particular value when considering circuit designs that utilize MFSFETs, especially digital memory circuits.