Local Field Enhancement Characteristics in a Tapered Metal-Coated Optical Fiber Probe for Nanolithography

Jianlei CuiState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China

Lijun YangKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. ChinaCorrespondence[email protected]

Yang WangSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China

Xuesong MeiState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China

Wenjun WangState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China

Chaojian HouKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China

Bai ChengKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China

Qiang DaiKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China

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Abstract

In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.

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Local Field Enhancement Characteristics in a Tapered Metal-Coated Optical Fiber Probe for Nanolithography

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Local Field Enhancement Characteristics in a Tapered Metal-Coated Optical Fiber Probe for Nanolithography

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