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Original Articles

High tunable BaSnxTi1-xO3 thin films for microwave applications

, , , , , , , & show all
Pages 140-146 | Received 05 Oct 2015, Accepted 12 Feb 2016, Published online: 17 Jun 2016
 

ABSTRACT

Thin films of BaSnxTi1-xO3 composition (Sn/Ti ≈50/50) are grown in-situ by RF magnetron deposition onto Pt/Ti/Al2O3 substrate. Structural and dielectric properties are optimized by changing substrate temperature. Best thin-film samples have shown a high tunability (about 3.5) and low dielectric losses attractive for microwave electronics.

Funding

The authors gratefully acknowledge the partial financial support of the Russian Foundation for Basic Research, research projects №13-02-12096 ofi-m and №15-02-99476 a.

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