Microstructure and optical performance of In₂S₃ thin films grown by chemical bath deposition

Wei LiSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, ChinaCorrespondence[email protected] [email protected]

Ping LiuSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

Ke ZhangSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

Fengcang MaSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

Xinkuan LiuSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

Xiaohong ChenSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

Daihua HeSchool of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai, China

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ABSTRACT

The In₂S₃ thin films were deposited by chemical bath deposition at different processing parameters. The In₂S₃ films were well crystallized when grown at pH values in the range of 1.6–2.0. With increase of the sulfide ion concentration and deposition temperature, the formation and growth rates of β-In₂S₃ crystals improve. Too high sulfide ion concentration and deposition temperature can induce decomposition of In₂S₃ crystals. When grown at pH value of 1.8, n_In:n_S ratio of 1:4 and deposition temperature of 80°C, the In₂S₃ film can achieve highly crystallized structure, high transmittance of over 80% and proper energy gap value of 2.74 eV.

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Funding

The present work was financially supported by the National Natural Science Foundation of China (No. 51101101), the Key Laboratory of Advanced Metal-based Electrical Power Materials (No. 5313310202) of Shanghai Municipal Commission of Education.

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Microstructure and optical performance of In₂S₃ thin films grown by chemical bath deposition

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Microstructure and optical performance of In₂S₃ thin films grown by chemical bath deposition