Nanofiber Network Formation by 50 keV Ar⁺-Ion Irradiation on GaSb Surface

Abstract

This paper presents formation of interconnected mesoporous structure using low energy (50 keV) Ar⁺-ion irradiation normal to the GaSb surface for the ion fluence 1 $\times$ 10¹⁶ and 5 $\times$ 10¹⁷ ions/cm². The surface morphology of pristine and ion irradiated samples was observed using field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). Depth profile of Ar⁺-ion distribution and cascade collisions with ion track in the irradiated GaSb epi-layer were simulated using stopping range ion in matter-transport range ion in matter (SRIM-TRIM) simulation. Presence of oxide phases such as gallium oxide (Ga₂O₃), antimony oxide (Sb₂O₃,) and elemental Sb in ion induced nanoporous GaSb structure is observed using X-ray photoelectron spectroscopy (XPS). The results are discussed using point defect formation mechanism during the ion irradiation process.

Keywords:

• GaSb
• ion-irradiation
• nanofibers
• mesoporous

Acknowledgments

The authors would like to thank to director SSPL. All the authors also like to thank the Inter University Accelerator Center Facility, New Delhi for helping in irradiation process.