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Abstract
Film bulk acoustic resonator (FBAR) based on single crystal LiNbO3 are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO3 has significant impacts on the FBAR performance, and the bulk acoustic wave (BAW) velocity was calculated by solving the Christoffel’s equation in each crystal orientation. The electromechanical coupling coefficient of every cut was obtained. Moreover, the impedance information and the film displacement of various crystal orientations were analyzed by the finite element method (FEM). Analytical results demonstrate that the effective coupling coefficient and the number of BAW modes vary with the crystal orientation.
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Funding
Open Access funding provided by the Qatar National Library. This work was supported by the following programs: National Key R&D Program of China (No. 2018YFB2002500), National Natural Science Foundation of China (No. 61801158, 61974037, 61904042, 61827806), NSFC-Zhejiang Joint Fund for the Integration of Industrialization and Information (No. U1909212), Zhejiang Province Key R & D programs (Nos. 2021C05004, 2018C01048, 2018C01037) and Zhejiang Lab (No. 2018EB0ZX01). This work was also supported by the open project of Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications.