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Abstract
The deposition of single phase perovskite lead titanate thin films by planar multi-target sputtering on silicon substrates covered with a thin Pt bottom electrode has been investigated. The films exhibited nearly random crystallographic orientation. The films are self polarized, that means they exhibited pyroelectric currents without poling treatment. After additional furnace annealing and poling the pyroelectric coefficient was 1.7.10−4 C/m2K. The annealing also reduced the dielectric loss tan δ from 0.05 to 0.01. The temperature measurement for calculation of the pyroelectric coefficient was performed by measuring the resistance of the bottom and top electrode via the van der Pauw method and calibration with a thermo chuck.