PZT, PLZT, LSC and platinum thin films produced in the open atmosphere using combustion Chemical Vapor deposition

Abstract

PZT, PLZT, LSC, and Pt thin film coatings have been deposited onto crystalline and amorphous substrates using the open atmosphere Combustion Chemical Vapor Deposition (CCVD^(SM) technique. X-ray diffraction (XRD) scans have indicated a high degree of preferred orientation for all of these coatings. Furthermore, XRD pole figure analysis has shown that coatings deposited onto single crystal substrates are single phase, while depositions onto amorphous substrates yield coatings with a fiber axis. Entrapment of airborne particles into the flame caused enough film inhomogeneity that electrical measurements could not be performed at this stage.

Key Words:

• Keywords
• PZT
• PLZT
• LSC
• CCVD
• thin film.