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Abstract
The dielectric properties of lead zirconate titanate (PZT) and barium strontium titanate (BST) films were measured in the frequency range of 10mHz-10GHz. Assessment of these films for analog capacitor applications is based on the dielectric dispersion data of the respective material. The capacitor operating frequency range is divided into two regions: low and high. In the low frequency region (<10Hz), extrinsic factors such as the barriers at the electrode/ferroelectric film interface largely influence the measured dielectric characteristics. In the high frequency range (>10MHz), the electrode series resistance may dominate over the capacitive reactance, thereby controlling the operating characteristics. The results indicated that there exist no bulk related dielectric relaxation phenomena in the frequency range of mHz to 6 GHz, in case of both PZT and BST. The presentation includes a discussion on the influence of extrinsic factors and interfacial contributions to the functional and reliability characteristics.
