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Abstract
PZT thin film capacitors with the composition Pb(Zr0.53Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RTP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.