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Abstract
PbTiO3 thin films, 5–200 nm in thickness, were epitaxially growth on miscut (001) SrTiO3 substrates by planar magnetron sputtering for understanding of film growth mechanism and their ferroelectricity. The surface of the miscut substrates with miscut angle of 1.7 degree contains periodic step lines and terraces; the step height is 0.4 nm and terrace width is 14 nm. The surface structures of PbTiO3 films comprised periodic striped patterns which was reflected in the initial surface of the substrate. It was found that under a stoichiometric film composition the film growth was governed by Frank-van der Merwe type and resultant epitaxial films showed extremely smooth surface. Deposition on a miscut substrate under a stoichiometric condition is essential to making the uniform ferroelectric thin films.