Domain structure of epitaxial PZT thin films grown on MgO(001) by RF magnetron sputtering

Abstract

Epitaxial Pb(Zr_xTi_1-x)O₃ (x=0.0∼0.32) thin films were successfully grown on MgO(001) single crystal by RF magnetron sputtering. Lattice constants and crystal quality of the films were measured by the X-ray θ-2θ scan and the FWHM of (001) rocking curves, respectively. Degree of c axis orientation and crystal quality of the films improved gradually with increasing Zr concentration. High temperature X-ray technique was employed to study the domain formation as a function of temperature during cooling from cubic phase to tetragonal phase. The initial values of α at the Curie temperature also increased with increasing Zr concentration.