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Abstract
The present trend in ferroelectric memories toward lower operating voltages, and consequently, thinner (less than 0.3 um) films is offset by other applications requiring thicker films in the range of 5 to 25 um. This wide range of film thicknesses imposes significantly different restraints on the films and their properties. The present investigation involved a study of selected properties of acetate-derived, multiply dip-coated PLZT films ranging in thickness from 0.3 um to 11.5 um. Films were deposited on Ag and Pt/Si substrates via a dip coating process and subsequently sintered at a temperature of 700°C for 3 minutes. Various properties (film smoothness, dielectric constant, hysteresis loop characteristics, etc.) of the films were determined as a function of film thickness. Coercive field was examined in more detail over the thickness range from 0.3 um to bulk material.