Low temperature ECR-CVD of (Ba,Sr)TiO₃ films

Abstract

This paper reports the deposition of polycrystalline SrTiO₃ at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO₃ thin films at low temperatures is hindered by the formation of the BaCO₃ phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments.

Key Words:

• ECR
• CVD
• phase stability diagram
• (Ba,Sr)TiO₃
• SrTiO₃
• direct liquid injection