Thick layer deposition of lead perovskites using diol-based chemical solution approach

Abstract

Lead zirconium titanate (PZT) powders and thin film capacitors were prepared using a diol-based chemical solution deposition method with thicker dielectric coating capability. The completed crystallization into the perovskite phase was determined at processing temperatures between 600∼700°C. Improved film coating thickness, uniformity and conformal coating ability were reported for the integration of thin film capacitors on patterned platinized silicon with a dielectric constant of 970 at 1 MHz and 920 at 200 MHz. Results were also reported for thermal analysis, X-ray diffraction, scanning electron microscopy, and reliability test.

Key Words:

• ferroelectric capacitors
• thin film
• sol-gel