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Integrated Ferroelectrics
An International Journal
Volume 18, 1997 - Issue 1-4
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Chemical solution deposition

A novel propionate-based chemical solution deposition method of La1-x(Ca, Sr)xMnO3 thin films for microelectronics applications

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Pages 339-350 | Published online: 19 Aug 2006
 

Abstract

Ceramic thin films of magnetoresistive La1-x(Ca, Sr)xMnO3 thin films with different stoichiometries were deposited onto different substrates by a novel chemical solution deposition method based entirely on metal propionates. The microstructure and crystallization temperature of the thin films were found to depend on thin film stoichiometry. Crystallization of the perovskite phase could be achieved at low temperatures of 650°C. Thin films display a ferromagnetic behaviour with sharp Curie temperatures TC. For thin films with identical compositions but different substrates large differences in the electrical properties were observed.

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