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Integrated Ferroelectrics
An International Journal
Volume 22, 1998 - Issue 1-4
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Session 7. Testing and characterization

Mass spectroscopy of recoiled ion investigation of electrode segregation effects during the initial stages of SrBi2Ta2O9 film growth

J. Im Materials Science and Chemistry Divisions National Laboratory, Argonne, Illinois, 60439; Materials Science Department, Northwestern University, Evanston, Illinois, 60208
,
A. R. Krauss Materials Science and Chemistry Divisions National Laboratory, Argonne, Illinois, 60439
,
O. Auciello Materials Science Division, Argonne National Laboratory, Argonne, Illinois, 60439
,
D. M. Gruen Materials Science and Chemistry Divisions National Laboratory, Argonne, Illinois, 60439
&
R. P. H. Chang Materials Science Department, Northwestern University, Evanston, Illinois, 60208
Pages 223-235 | Received 10 Apr 1998, Published online: 19 Aug 2006
 
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Abstract

The thermodynamic stability of Pt/Ti/SiO2/Si, Pt/TiO2/SiO2/Si, Pt/Ta/SiO2/Si, Ir/SiO2/Si, and RuO2/SiO2/Si electrode layers has been studied using mass spectroscopy of recoiled ions (MSRI), a new technique which provides monolayer-specific in situ surface analysis under conditions of modest oxygen partial pressures required for oxide film growth using sputter-deposition. Results of the initial stages of growth of SrBi2Ta2O9 films on the various substrates listed above are presented also. It is found that the initial growth of SrBi2Ta2O9 films strongly depends on the composition of the bottom electrode surface, on diffusion and segregation processes, and the presence of reactive species on the electrode surface.

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