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Integrated Ferroelectrics
An International Journal
Volume 20, 1998 - Issue 1-4
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Contributed papers

Fatigue effects in ferroelectric films studied by scanning force microscopy

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Pages 263-264 | Published online: 27 Sep 2006
 

Abstract

In the present paper we use scanning force microscopy (SFM) to perform a study of domain structures and switching behaviour of PZT ferroelectric thin films integrated into heterostructures with different electrodes, which yield different fatigue characteristics. The principle of domain visualization by SFM is based on the detection of the surface vibration induced by an external ac field applied to the sample through the SFM tip and was described in detail in previous publications[1,2]. The films were imaged by applying an ac voltage with an amplitude of 1–3 V and a frequency of 10 kHz. The topographic image of the film surface was taken simultaneously with the domain imaging. Pb(Zr0.53Ti0.47)O3 films were deposited onto electroded MgO (100) substrates by a sol-gel technique. The thickness of the films was 0.18 μm. For this study, two types of electrodes, namely Pt and RuO2 electrodes, were used to prepare samples, hereafter designated as PZT/Pt and PZT/RuO2, respectively.

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