Planar electrostatic micromotors on the basis of the ferroelectric films

Abstract

The principle of the operation of the step petalous micromotors based on the effect of the electrostatic rolling on the ferroelectric surface is considered. These micromotors produced by means of microelectronic technology are distinguished as being energy-intensive (more than 1 J/m² at 20–40 V voltage) and they provide precise movement: the step ranges from 10 Å to 100 μm. The technical and experimental data are given characterizing the energetic and mechanical parameters of these micromotors.

Key Words:

• Ferroelectric films
• micromotor
• electrostatics