Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

Suizhou Yang Center for Advanced Materials, University of Massachusetts, Lowell, MA, 01854 Phone: 978-934-3695 Fax: 978-934-3695

Ke Yang Center for Advanced Materials, University of Massachusetts, Lowell, MA, 01854 Phone: 978-934-3707 Fax: 978-934-3707

Aloke Jain Center for Advanced Materials, University of Massachusetts, Lowell, MA, 01854 Phone: 978-934-3707 Fax: 978-934-3707

Ramaswamy Nagarajan Department of Plastics Engineering, University of Massachusetts, Lowell, MA, 01854 Phone: 978-934-3454 Fax: 978-934-3454

Jayant Kumar Department of Physics and Applied Physics, University of Massachusetts, Lowell, MA, 01854 Phone: 978-934-3687 Fax: 978-934-3687

Abstract

A novel method for maskless micro-patterning of polymeric substrates is presented. First, an azobenzene functionalized polymer film is spin-coated on a Poly (ethylene terephthalate) (PET) sheet. Then surface relief structures are optically inscribed on the polymer film by interference of laser beams. The patterned azobenzene functionalized film is then etched in the plasma chamber such that the gratings are transferred to the PET substrate. Finally, any remaining azobenzene functionalized polymer is dissolved away using an appropriate solvent. This method of patterning can be broadly applied to a variety of flexible/polymeric substrates and the resolution is not limited by the substrate thermo-mechanical properties.

Keywords:

Acknowledgement

The authors thank the National Science Foundation, ECS-0601602 and DMR0075170 for the financial support of this work.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

Information for

Open access

Opportunities

Help and information

Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

Abstract

Acknowledgement

Reprints and Corporate Permissions

Academic Permissions

Related research

To cite this article:

Download citation

Information for

Open access

Opportunities

Help and information

Keep up to date

Your download is now in progress and you may close this window

Login or register to access this feature