A Simple Technique for Submicron Scale Patterning of Silver Using Visible Light Interference

Abhishek Kumar Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854; Department of Physics, University of Massachusetts Lowell, Lowell, MA, 01854

Subhalakshmi Nagarajan Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854; Department of Chemistry, University of Massachusetts Lowell, Lowell, MA, 01854

Ke Yang Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854; Department of Physics, University of Massachusetts Lowell, Lowell, MA, 01854

Robinson Anandakathir Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854

Jagdeep Singh Department of Chemistry, University of Massachusetts Lowell, Lowell, MA, 01854

Ramaswamy Nagarajan Department of Plastic Engineering, University of Massachusetts Lowell, Lowell, MA, 01854

Aloke Jain Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854

Jayant Kumar Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854; Department of Physics, University of Massachusetts Lowell, Lowell, MA, 01854

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Abstract

A novel, one step and simple methodology for the fabrication of submicron scale silver patterns is demonstrated. The photosensitivity of an organic silver salt has been utilized for this purpose of fabrication. The silver-organometallic compound is converted to metallic silver selectively in the illuminated regions. Surface morphology was studied by scanning electron microscopy (SEM). Energy dispersion spectroscopy (EDS) shows the presence of silver in the developed film. X-ray photoelectron spectroscopy (XPS) confirms the formation of metallic silver. Feature sizes of the order of 200 nm have been achieved using this technique.

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Acknowledgement

We thank Mr. John Pennace from FLEXcon Inc for valuable discussion. This study was supported by National Science Foundation (NSF ECS 0601602).

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A Simple Technique for Submicron Scale Patterning of Silver Using Visible Light Interference

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A Simple Technique for Submicron Scale Patterning of Silver Using Visible Light Interference

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