Recent advances in decomposition of the most potent greenhouse gas SF₆

ABSTRACT

The continuously increasing commercial use of SF₆ in the power industry, semiconductor manufacturing industry, and other related industries has led to a great increase in global total SF₆ emission amount and the SF₆ concentration in the atmosphere. The SF₆ abatement strategies had received special attention due to the fact that SF₆ has very high global warming potentials and long atmospheric lifetime. This paper reviews and summarizes the research findings on the various approaches and methods that are currently being used or under investigation. Particular interest is given to the development of nonthermal plasma techniques for the removal of SF₆.

KEYWORDS:

• Catalytic degradation
• greenhouse gas
• nonthermal plasma
• SF₆ removal
• thermal decomposition

Additional information

Funding

This work was supported by the National Natural Science Foundation of China under Grant 51777144.