Imaging of random surfaces and inverse scattering in the Kirchoff approximation

Abstract

Imaging of random surfaces can be modelled by integration over angular spectra of scattered plane waves. This approach suggests the representation of surface scattering in the Kirchhoff approximation using the concept of three-dimensional spatial frequencies. Optical methods of surface profiling can thus be modelled, leading to an insight into reconstruction of surface profiles from scattering data. The methods can also be extended to cover thin-film multilayer structures.