Contrast-matching small-angle neutron-scattering experiments on obliquely evaporated amorphous GeSe₃ films

Abstract

Small-angle neutron-scattering contrast-matching experiments have been performed on obliquely deposited amorphous GeSe3 films. The films are found to have two types of void: one anisotropic with a ratio of major to minor axes of about five; the other isotropic and a factor of ten smaller in volume. Although the scattering data are difficult to interpret, there is reason to believe that surface (rugosity) scattering does not play the dominant role.