Azide photoresist for thermal-laser imaging

Abstract

Two azide-type compounds for thermal-laser photoresists have been investigated. One was an azide-pendant polyvinyl ether) as a binder polymer for positive imaging, and the other was a cyanine dye azide for negative imaging. The positive photoresist, which was composed of nigrosine as an infrared (IR)-absorbing dye and an azide-pendant polyvinyl ether), and the negative photoresist, which was composed of a Novolak resin and a cyanine dye azide as an IR-absorbing dye, were exposed by scanning a light spot of 15 mm from a 780 nm, 30 mW laser, giving sensitivities of 340 and 500 mJ/cm2 for the positive and the negative photoresist.

Key Words:

• Azide compound
• Azide-pendant polymer
• Cyanine dye azide
• Ablation
• Thermal-laser photopolymer