Dynamic analysis of micro-cantilever with electrostatic force

ABSTRACT

Micro-cantilever beam are now widely used in modern micro and nano devices. This device includes micro-switches and microscopes which are operated by atomic force. The dynamic analysis of cantilever beams is of critical prior to manufacturing of the beams. Dynamic analysis is carried out using an energy technique based on Galerkin method and pull-in parameters are to be found out for prismatic cantilever. In squeeze film damping the air present between movable beam and fixed beam behave as squeezed fluid and producing the damping effect which lead to reducing in displacement. In case of fringing field the line of action of electrostatic force do not remain perpendicular at the boundaries. The effect of damping due to Squeeze film and fringing field on dynamic performance of beam is studied and found out the pull-in factors and matched with the published outcomes. This area opens novel opportunities for structural optimization of electrostatic micro-beams.

KEYWORDS:

• Pull-in instability
• electrostatic actuation
• Galerkin method
• squeezed film damping
• fringing field effect

Nomenclature

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Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Notes on contributors

Anchit J. Kaneria

Anchit J. Kaneria is M.Tech  in Mechanical Engineering from Nirma University and he is pursuing his Ph.D. from Gujarat Technological University. He has teaching experience of more than 7 years.

Pinank Patel

Pinank Patel is Ph.D in Mechanical Engineering.  He is Head of Department in Mechanical Engineering Department Marwadi University, He has teaching experience of more than 19 years. His are of specialization are Machine design and dynamics of Machines.

D. S. Sharma

D. S. sharma is Ph.D in Mechanical Engineering from IIT bombay and he has total teaching experience of 22 years. he is  Professor and Head of Department in Mechanical Engineering M.S.University Baroda. His are of interest are Stress Analysis, Dynamics and Design of machines.

Reena Trivedi

Reena Trivedi is working as Associate Professor in Mechanical Engineering Department at Nirma University. She has experience of more than 23 years in the field of teaching, research and industry. Her area of interest is MEMS, optimization, FEA.