Abstract
Perfluoroisobutylene is a highly toxic compound which is evolved from the decomposition of the fluorocarbon used in the condensation reflow soldering process. Accurate analysis for this material has been hampered by the inability to secure reliable standards. This paper will describe the use of a wafer permeation device as a primary standard. The percent error for the permeation rates was calculated from the linear regression analyses of the weight loss versus time data and was 1.1% for a 113 ng/min device and 2.3% for a 62 ng/min device. The relative standard deviation for generating and analyzing standards prepared from these permeation devices was found to range from 0.4% at the 40 parts per billion (ppb) level to 7.3% at the 1 ppb level.