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Helium‐permselective silicon carbide (SiC) membrane was successfully synthesized on an outer surface of γ‐alumina‐coated α‐alumina porous support by both pyrolysis of polycarbosilane without oxygen‐curing process and chemical vapor infiltration (CVI). An amorphous SiC membrane possessed He permeance of 7.7×10−8 mol · m−2 · s−1 · Pa−1, He/CO2 permselectivity of 64, and He/H2 permselectivity of 4.4 at 873 K. CVI process is an effective way to increase permselectivity of gases with small kinetic diameter.
Acknowledgment
This work was carried out as a part of the R&D Project on “Highly Efficient Ceramic Membranes for High‐Temperature Separation of Hydrogen” supported by the New Energy and Industrial Technology Development Organization (NEDO), Japan.