An innovative application of double slider-crank mechanism in efficient of the scanning acoustic microscopy system

Abstract

This paper proposes an innovative application of double slider-crank mechanism, which is utilized to develop a fast scanning module (FSM) of the scanning acoustic microscopy (SAM) system for evaluating the quality of 12-inch silicon wafer, that is, WFSAM system. In this application, the slider displacement and velocity are two critical parameters that must be carefully calculated to ensure the WFSAM system operates properly. Based on the scanning requirements, the slider displacement and velocity were calculated to determine the operation parameters of WFSAM system. A custom sample with known dimensions was prepared to scan using WFSAM system, which validated the WFSAM capabilities in order to provide internal information with accurate measurement. The quality of two 12-inch silicon wafers was evaluated using the WFSAM system. Finally, the design process of slider-crank mechanism is illustrated by a flowchart, which is used to develop the FSM of SAM system for inspecting any sample size.

Keywords:

• Slider-crank mechanism application
• fast SAM
• semiconductor wafer inspection
• ultrasonic NDT

Disclosure statement of competing interest

The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

Additional information

Funding

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. 2022R1A5A8023404).