Characteristics of ITO Thin Films for Organic Light Emitting Diode by using a Low-Frequency Magnetron Sputtering Method

Myung Chan Kim Mobile Display Research Center, Kyungpook National University, Daegu, Korea

Sang Ho Sohn Department of Physics, Kyungpook National University, Daegu, KoreaCorrespondence[email protected]

Duck Kyu Park Department of Physics, Kyungpook National University, Daegu, Korea

Sang Kooun Jung Department of Physics, Kyungpook National University, Daegu, Korea

Eun Lyoung Kim Department of Physics, Kyungpook National University, Daegu, Korea

Yun Su Lee Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea

Youngjune Hur Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea

Lee Soon Park Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea

Kyu-Han Choi Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea

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Abstract

In this study, we have tried the growth of indium tin oxide (ITO) thin films by using low-frequency magnetron sputtering method (LFMSM). Characteristics of ITO thin films deposited on polyethersulfone (PES) and polyetyleneterephthalate (PET) substrates are investigated. Experiments were carried out as a function of deposition time. With increasing the deposition time of the ITO thin films on PES substrate, the sheet resistance is decreased. ITO thin films on polymer substrates were amorphous structure.

Keywords:

Acknowledgments

This work was supported by the Industrial Technology Infrastructure Promotion Program of the Ministry of Commerce, Industry and Energy of Korea.

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Characteristics of ITO Thin Films for Organic Light Emitting Diode by using a Low-Frequency Magnetron Sputtering Method

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Characteristics of ITO Thin Films for Organic Light Emitting Diode by using a Low-Frequency Magnetron Sputtering Method

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