Fabrication of moth-eye structure on photoresist film by laser control of reaction time constant

ABSTRACT

We have proposed the fabrication of high-contrast-moth-eye structure using continuous wave (CW) laser. Nonlinear-optical reaction time constant of the photoresist can be controlled by manipulating the exposure intensity and scanning speed of the laser. As a result, shortening the time constant in the intense beam area and lengthening that in the weak beam area compared with the scanning speed, we can limit the exposed area.

Keywords:

• CW laser
• moth-eye
• photoresist
• nonlinear optics
• reaction time constant