Abstract
In this work, SnO2 thin film was obtained with different annealing temperature by solution process. The result showed that transmittance in visible light region is related to the surface roughness, crystallinity, precursor impurity amount, and the presence of cracks and blisters. Annealing deposited films at a temperature below 300 °C, as temperature increases, remaining organic component decreases and transmittance increases while phase composition staying unchanged and without cracks and blisters. The substrate temperature has a positive effect on the sheet resistance of SnO2 thin film below 500 °C. SnO2 thin film with sheet resistance of 12.5kΩ and average transmittance in visible light region of 97% was acquired at 300 °C.
Acknowledgement
This work was supported by National Key R&D Program of China (No.2016YFB0401504), National Natural Science Foundation of China (Grant.51771074, 51521002 and U1601651), National Key Basic Research and Development Program of China (973 program, Grant No.2015CB655004) Founded by MOST (No.2016A030313459 and 2017A030310028), Guangdong Science and Technology Project (No.2016B090907001, 2016A040403037, 2016B090906002, 2017B090907016 and 2017A050503002), Guangzhou Science and Technology Project (201804020033).
Ethics
The content of this study is fabricating thin film by solution technology. Therefore, no ethical issues are involved.
Conflicts of Interest
The authors declare no conflict of interest.
Permission to carry out fieldwork
Our experiment is based on the national project, therefore, no special permissions and licenses are required.
Data Availability
The authors confirm that the data supporting the findings of this study are available within the article and its supplementary materials.
Additional information
Notes on contributors
Weijian Yuan
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Xianzhe Liu
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Zhiqiang Fang
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Honglong Ning
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Xu Zhang
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Yuxi Deng
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Peimiao Deng
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Zhihao Liang
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Rihui Yao
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.
Junbiao Peng
Weijian Yuan, Xianzhe Liu, Honglong Ning and Rihui Yao designed the research; Xu Zhang and Yuxi Deng performed the experiments; Peimiao Deng and Zhihao Liang analyzed the data; Ruihui Yao, Zhiqiang Fang and Junbiao Peng provided valuable discussions and suggestions; Honglong Ning and Weijian Yuan wrote the paper.