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ABSTRACT
This study developed an integrated (flow, voltage, and temperature) micro sensor using the micro-electro-mechanical systems (MEMS) technology. It was inserted into the high temperature proton exchange membrane fuel cell (HT-PEMFC) for local real-time measurement. The integrated micro sensor is made of 40 µm thick stainless steel base material, and its protective layer is formed by polyimide (PI) that has better temperature resistance. The integrated micro sensor has three functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and being able to be put in any place for measurement. After calibration, and its reliability confirmed, the integrated micro sensor is inserted into the HT-PEMFC for local microcosmic measurement.
Acknowledgments
The authors thank Shih Hung Chan, Ay Su, and Guo-Bin Jung of Yuan Ze University for their valuable advice and assistance in the experiments. In addition, we thank the YZU Fuel Cell Center and NENS Common Lab for providing access to their research facilities.
Funding
This work was accomplished with much needed support and the authors thank for the financial support by Bureau of Energy, Ministry of Economy Affair of R.O.C. through grants 102-D0622 and Ministry of Science and Technology of R.O.C. through the grant MOST 102-2221-E-155-033-MY3, 102-2622-E-155-017-CC2, 103-2622-E-155-004, 104-2622-E-155-007-CC2, 105-ET-E-155-002-ET, and 105-2622-8-155-003-TE3.
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