Case Study

Hazard Identification of Powder Generated from a Chemical Vapor Deposition Process in the Semiconductor Manufacturing Industry

Kwang-Min Choi Samsung Health Research Institute, Samsung Electronics Co., Ltd., Yongin-City, Gyeonggi-do, Republic of Korea

Tai-Hyoung Kim Environment & Safety Team, Samsung Electronics Co., Ltd., Yongin-City, Gyeonggi-do, Republic of Korea

Kwan-Sick Kim Environment & Safety Team, Samsung Electronics Co., Ltd., Yongin-City, Gyeonggi-do, Republic of Korea

Soo-Geun Kim Samsung Health Research Institute, Samsung Electronics Co., Ltd., Yongin-City, Gyeonggi-do, Republic of Korea; Department of Occupational Medicine, Kangbuk Samsung, Hospital, Sungkyunkwan University School of Medicine, Seoul, Republic of Korea

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ACKNOWLEDGMENTS

The authors are grateful to the Device Analysis Group, Yield Enhancement Team for supporting SEM and TEM analyses.

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Case Study

Hazard Identification of Powder Generated from a Chemical Vapor Deposition Process in the Semiconductor Manufacturing Industry

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Case Study

Hazard Identification of Powder Generated from a Chemical Vapor Deposition Process in the Semiconductor Manufacturing Industry

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