Abstract
A method has been established for producing silicon surface barrier detectors having an energy resolution of 0.7% for 5.3 MeV α particles, and which are stable for long periods of time. The fabricated detector has been proved to possess a depletion layer as thick as 200 μ and a surface layer with energy loss less than 15 keV for 5.3 MeV α particles. The stability of the detector was also tested and it was found to be stable for at least 2–3 months.